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					‘ͺΚ·x: 
					6mm 
					
					
					‘ͺΚ[x: 
					0.25mm/ 0.8mm /2.5mm 
					
					
					‘ͺΚ¬x: 
					1mm/sec 
					
					
					‘πΝx: 
					Ra: 0.05-10.0microns / Rz: 0.1-50microns 
					
					
					‘dς: 
					RC Analog 
					
					
					‘ͺΚΈx: 
					Conform to ISO Class 3 (}15% ) 
					
					
					‘ͺΚͺ: 
					10microns +/- 2.5microns 
					
					
					‘Hμ溫x: 
					5 to 40 C 
					
					
					‘gpΒd’[d  |